Methods for depositing gap filling fluids and related systems and devices

ABSTRACT

Methods and systems for manufacturing a structure comprising a substrate. The substrate comprises plurality of recesses and a plurality of lateral spaces. The recesses and lateral spaces are at least partially filled with a gap filling fluid.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application claims priority to U.S. Provisional Patent ApplicationSer. No. 62/971,686 filed Feb. 7, 2020 titled METHODS FOR DEPOSITING GAPFILLING FLUIDS AND RELATED SYSTEMS AND DEVICES, the disclosures of whichare hereby incorporated by reference in their entirety.

FIELD OF INVENTION

The present disclosure generally relates to methods and systems suitablefor forming electronic devices. More particularly, the disclosurerelates to methods and systems that can be used for depositing a gapfilling fluid in trenches and lateral spaces by plasma-assisteddeposition.

BACKGROUND OF THE DISCLOSURE

The scaling of semiconductor devices has led to significant improvementsin speed and density of integrated circuits. However, withminiaturization of wiring pitch of large scale integration devices,void-free filling of high aspect ratio trenches (e.g., trenches havingan aspect ratio of three or higher) becomes increasingly difficult dueto limitations of existing deposition processes. Therefore, thereremains a need for processes that efficiently fill high aspect ratiofeatures, such as trenches, on semiconductor substrates. There furtherremains a need for processes that can additionally fill buried spacesbelow a substrate surface.

One gap fill method is disclosed in International Publication No. WO2019/152055. However, this method does not disclose the filling ofburied layers with a gap filling fluid.

Any discussion, including discussion of problems and solutions, setforth in this section has been included in this disclosure solely forthe purpose of providing a context for the present disclosure. Suchdiscussion should not be taken as an admission that any or all of theinformation was known at the time the invention was made or otherwiseconstitutes prior art.

SUMMARY OF THE DISCLOSURE

Various embodiments of the present disclosure relate to gap fillingmethods, to structures and devices formed using such methods, and toapparatus for performing the methods and/or for forming the structureand/or devices. The ways in which various embodiments of the presentdisclosure address drawbacks of prior methods and systems are discussedin more detail below.

Provided herein is a method of filling a gap comprising: introducing ina reactor chamber a substrate provided with a gap, the gap comprising arecess and a lateral space extending substantially laterally from therecess; introducing a precursor into the reactor chamber; introducing aco-reactant into the reactor chamber; and, introducing a plasma in thereactor chamber; whereby the precursor and the co-reactant react to forma gap filling fluid that at least partially fills the recess and thelateral space of the gap.

In some embodiments, the co-reactant comprises nitrogen and/or ammonia.

In some embodiments, the co-reactant comprises a noble gas.

In some embodiments, the noble gas is selected from the list consistingof He, Ne, Ar, and Kr.

In some embodiments, the noble gas is Ar.

In some embodiments, the precursor is a cyclosilazane precursor.

In some embodiments, the reactor chamber is at a pressure of at least700 Pa to at most 1,500 Pa and at a temperature of at least 50° C. to atmost 150° C.

In some embodiments, the reactor chamber is at a pressure of at least900 Pa to at most 1,200 Pa.

In some embodiments, the reactor chamber is at a temperature of at least50° C. to at most 75° C.

In some embodiments, the cyclosilazane precursor is selected from thegroup consisting of a cyclotrisilazane precursor, a cyclotetrasilazaneprecursor, and a cyclopentasilazane precursor.

In some embodiments, the cyclosilazane precursor has the followingformula:

wherein any one of R1 to R9 are each independently selected from thegroup consisting of hydrogen and C1 to C5 branched or linear alkyl,alkenyl, alkynyl, and alkylamine.

In some embodiments, the precursor and the co-reactant are introducedsimultaneously.

In some embodiments, introducing the co-reactant is providedcontinuously, the precursor is provided in a plurality of precursorpulses, the plasma is provided in a plurality of plasma pulses, whereinindividual precursor pulses and individual plasma pulses are separatedby purge steps.

In some embodiments, the cyclosilazane precursor consists entirely of N,C, H, and Si.

In some embodiments, the cyclosilazane precursor consists entirely of N,C, and Si.

In some embodiments, the cyclosilazane precursor does not contain anyoxygen.

In some embodiments, the cyclosilazane precursor does not contain anyhalogens.

In some embodiments, no gasses other than the cyclosilazane precursor,ammonia, and nitrogen are introduced into the reactor chamber throughoutintroducing the precursor, the co-reactant and the plasma.

In some embodiments, the substrate comprises a semiconductor.

In some embodiments, the method includes entirely filling the pluralityof recesses with a gap filling fluid.

In some embodiments, the method includes entirely filling the one ormore lateral spaces with a gap filling fluid.

In some embodiments, the method comprises curing the gap filling fluid.

In some embodiments, the step of curing involves the use of a directplasma and the method for filling a gap comprises a plurality of cyclesin which gap filling fluid deposition and plasma treatment steps arealternated.

In some embodiments, the step of curing involves the use of an indirectplasma after the gap has been filled with the gap filling fluid.

In some embodiments, the step of curing involves the use of a noble gasplasma.

In some embodiments, the step of curing involves the use of a micropulsed plasma involving the sequential application of a plurality plasmaon and plasma off pulses.

In some embodiments, the step of curing comprises subjecting thesubstrate to a micro pulsed plasma comprising a sequential applicationof a plurality of micro pulse cycles, a micro pulse cycle comprising aplasma on pulse and a plasma off pulse.

In some embodiments, the micro pulsed plasma employs a noble gas as aplasma gas.

In some embodiments, the substrate is a 300 mm silicon wafer, and aplasma gas flow rate of at least 5.0 slm is maintained during the micropulsed plasma.

Further described herein is a structure comprising a semiconductorsubstrate provided with a gap comprising a recess and a lateral spaceextending laterally from the recess; wherein the recess and the lateralspace are at least partially filled with a gap filling fluid.

In some embodiments, the lateral space has a height of at least 1.0 nmto at most 40.0 nm, or at least 2.0 nm to at most 20.0 nm, or of atleast 3.0 nm to at most 18.0 nm, or of at least 4.0 nm to at most 16.0nm, or of at least 5.0 nm to at most 15.0 nm, or of at least 6.0 nm toat most 14.0 nm, or of at least 7.0 nm to at most 13.0 nm, or of atleast 8.0 nm to at most 12.0 nm, or of at least 9.0 nm to at most 11.0nm, or of about 10.0 nm.

In some embodiments, the gap filling fluid extends in the lateral spacefor a distance of at least 1.0 nm to at most 100.0 nm, or from at least1.5 nm to at most 50.0 nm, or from a distance of at least 2.0 nm to atmost 25.0 nm, or from a distance of at least 3.0 nm to at most 20.0 nm,or from a distance of at most 4.0 nm to at most 18.0 nm, or from adistance of at least 5.0 nm to at most 16.0 nm, or from a distance of atleast 6.0 nm to at most 14.0 nm, or from a distance of at least 8.0 nmto at most 12.0 nm, or for a distance of about 10.0 nm.

In some embodiments, the gap filling fluid comprises a polysilazaneoligomer.

In some embodiments, the polysilazane oligomer is branched.

In some embodiments, the polysilazane oligomer comprises a plurality ofoligomeric species.

In some embodiments, the gap filling fluid completely fills at least90%, preferably at least 95%, more preferably at least 99%, mostpreferably all of the recesses.

In some embodiments, the gap filling fluid completely fills at least90%, preferably at least 95%, more preferably at least 99%, mostpreferably all of the lateral space.

In some embodiments, the gap filling fluid is substantially free ofvoids.

In some embodiments, the gap filling fluid extends in the one or morelateral space for a distance of at least 3 nm.

In some embodiments, the recess has a depth of at least 5 nm to at most500 nm, or of at least 10 nm to at most 250 nm, or from at least 20 nmto at most 200 nm, or from at least 50 nm to at most 150 nm, or from atleast 100 nm to at most 150 nm.

In some embodiments, the recess has a width of at least 10 nm to at most10,000 nm, or of at least 20 nm to at most 5,000 nm, or from at least 40nm to at most 2,500 nm, or from at least 80 nm to at most 1,000 nm, orfrom at least 100 nm to at most 500 nm, or from at least 150 nm to atmost 400 nm, or from at least 200 nm to at most 300 nm.

In some embodiments, the recess has a length of at least 10 nm to atmost 10,000 nm, or of at least 20 nm to at most 5,000 nm, or from atleast 40 nm to at most 2,500 nm, or from at least 80 nm to at most 1000nm, or from at least 100 nm to at most 500 nm, or from at least 150 nmto at most 400 nm, or from at least 200 nm to at most 300 nm.

In some embodiments, the lateral space, wherein the lateral space areprovided in the source and/or drain regions of gate-all-aroundtransistors, and wherein the gap filling fluid serves as an interlayerdielectric.

In some embodiments, the gap filling fluid is cured.

Further described is structure including a gap filled according to amethod as described herein.

Further described is a gate all around transistor comprising a gapfilling fluid as an interlayer dielectric. In some embodiments, the gapfilling fluid is cured.

Further described herein is a system configured to perform a method forfilling a gap as described herein, and/or configured to form a structurecomprising a filled gap, as described herein.

Further described herein is a system comprising: one or more reactionchambers;

-   -   a gas injection system fluidly coupled to at least one of the        one or more reaction chambers; a first gas source for        introducing a precursor and optionally a carrier gas in the        reactor chamber; a second gas source for introducing a mixture        of one or more further gasses into the reactor chamber; an        exhaust; and a controller. The controller is configured to        control gas flow into the gas injection system to carry out a        method for filling a gap as described herein.

In accordance with yet additional examples of the disclosure, a systemto perform a method as described herein and/or to form a structure,device, or portion thereof either is disclosed.

In accordance with yet additional examples of the disclosure, acontroller arranged for processing instructions for carrying out amethod as described herein and/or for manufacturing a structure, device,or portion thereof, is disclosed.

In accordance with yet additional examples of the disclosure, a datacarrier having stored thereon computer-readable instructions forcarrying out a method as described herein and/or for manufacturing astructure, device, or portion thereof, is disclosed.

These and other embodiments will become readily apparent to thoseskilled in the art from the following detailed description of certainembodiments having reference to the attached figures. The invention isnot being limited to any particular embodiments disclosed.

BRIEF DESCRIPTION OF THE DRAWING FIGURES

A more complete understanding of the embodiments of the presentdisclosure may be derived by referring to the detailed description andclaims when considered in connection with the following illustrativefigures.

FIG. 1 is a schematic representation of a plasma-enhanced atomic layerdeposition (PEALD) apparatus suitable for depositing a structure and/orfor performing a method in accordance with at least one embodiment ofthe present disclosure.

FIG. 2 illustrates a schematic representation of a precursor supplysystem using a flow-pass system (FPS) usable in accordance with at leastone embodiment of the present disclosure.

FIG. 3 is a scanning transmission electron microscope (STEM) micrographof a test structure (100) comprising a trench (140), unfilled lateralspace (130), and gap filling fluid in lateral space (131).

FIG. 4 shows further details on the filling capability of someembodiments of gap filling fluids used to fill gaps in accordance withat least some embodiments of the methods described herein.

FIG. 5 illustrates how top growth per cycle and bottom growth per cycleare measured.

FIG. 6 illustrates an embodiment of a single gap filling fluiddeposition cycle when N₂ and NH₃ are used as co-reactant.

FIG. 7 illustrates an embodiment of a single gap filling fluiddeposition cycle when Ar is used as a co-reactant.

Throughout the figures, the following numbers and symbols are used:100—test structure; 110—gap filling fluid; 120—silicon oxide;130—lateral space; 135—silicon nitride; 140—trench; w_(t)—width oftrench; h_(v)—height of lateral space; w_(v)—width of lateral space;h_(t)—height of trench; T_(t)—thickness of gap fill fluid deposited onthe top of a sample; T_(b)—thickness of gap fill fluid deposited in thebottom of a trench.

It will be appreciated that elements in the figures are illustrated forsimplicity and clarity and have not necessarily been drawn to scale. Forexample, the dimensions of some of the elements in the figures may beexaggerated relative to other elements to help improve understanding ofillustrated embodiments of the present disclosure.

DETAILED DESCRIPTION OF EXEMPLARY EMBODIMENTS

The description of exemplary embodiments of methods, structures, devicesand systems provided below is merely exemplary and is intended forpurposes of illustration only; the following description is not intendedto limit the scope of the disclosure or the claims. Moreover, recitationof multiple embodiments having stated features is not intended toexclude other embodiments having additional features or otherembodiments incorporating different combinations of the stated features.For example, various embodiments are set forth as exemplary embodimentsand may be recited in the dependent claims. Unless otherwise noted, theexemplary embodiments or components thereof may be combined or may beapplied separate from each other.

In this disclosure, “gas” can include material that is a gas at normaltemperature and pressure (NTP), a vaporized solid and/or a vaporizedliquid, and can be constituted by a single gas or a mixture of gases,depending on the context. A gas other than the process gas, i.e., a gasintroduced without passing through a gas distribution assembly, amulti-port injection system, other gas distribution device, or the like,can be used for, e.g., sealing the reaction space, and can include aseal gas, such as a rare gas. The terms “rare gas” and “noble gas” asused herein may be used interchangeably. In some cases, the term“precursor” can refer to a compound that participates in the chemicalreaction that produces another compound, and particularly to a compoundthat constitutes a film matrix or a main skeleton of a film; the term“reactant” may be used interchangeably with the term precursor.

As used herein, the term “co-reactant” refers to a gas which reactsand/or interacts with a precursor in order to form a flowable gap filllayer as described herein. The co-reactant may activate the precursoroligomerization. The co-reactant may be a catalyst. The co-reactant doesnot necessarily have to be incorporated in the gap filling fluid whichis formed, though the co-reactant does interact with the precursorduring formation of the gap filling fluid. Possible co-reactants includeHe, Ar, N₂, H₂, and NH₃. Alternative expressions for the term“co-reactant” as used herein may include “gas mixture,” “one or morefurther gasses,” and “gas mixture comprising one or more furthergasses.”

As used herein, the term “substrate” can refer to any underlyingmaterial or materials that can be used to form, or upon which, a device,a circuit, or a film can be formed. A substrate can include a bulkmaterial, such as silicon (e.g., single-crystal silicon), other Group IVmaterials, such as germanium, or other semiconductor materials, such asa Group II-VI or Group III-V semiconductor, and can include one or morelayers overlying or underlying the bulk material.

Further, in this disclosure, any two numbers of a variable canconstitute a workable range of the variable, and any ranges indicatedmay include or exclude the endpoints. Additionally, any values ofvariables indicated (regardless of whether they are indicated with“about” or not) may refer to precise values or approximate values andinclude equivalents, and may refer to average, median, representative,majority, or the like. Further, in this disclosure, the terms“including,” “constituted by” and “having” refer independently to“typically or broadly comprising,” “comprising,” “consisting essentiallyof,” or “consisting of” in some embodiments. In this disclosure, anydefined meanings do not necessarily exclude ordinary and customarymeanings in some embodiments.

As used herein, the term “comprising” indicates that certain featuresare included, but that it does not exclude the presence of otherfeatures, as long as they do not render the claim unworkable. In someembodiments, the term “comprising” includes “consisting.”

As used herein, the term “consisting” indicates that no further featuresare present in the apparatus/method/product apart from the onesfollowing said wording.

As used herein, the term “gap filling fluid,” also referred to as“flowable gap fill,” may refer to an oligomer which is liquid under theconditions under which is deposited on a substrate and which has thecapability to cross link and for a solid film.

In this disclosure, the term “filling capability” refers to a capabilityof filling a gap substantially without voids (e.g., no void having asize of approximately 5 nm or greater in diameter) and seams (e.g., noseam having a length of approximately 5 nm or greater), whereinseamless/void-less bottom-up growth of a layer is observed. The growthat a bottom of a gap may be at least approximately 1.5 times faster thangrowth on sidewalls of the gap and on a top surface having the gap. Afilm having filling capability is referred to as “flowable film” or“viscous film.” The flowable or viscous behavior of a film is oftenmanifested as a concave surface at a bottom of a trench.

In this disclosure, a recess between adjacent protruding structures andany other recess pattern may be referred to as a “trench.” That is, atrench may refer to any recess pattern including a hole/via. A trenchcan have, in some embodiments, a width of about 20 nm to about 100 nm,and typically about 30 nm to about 50 nm. When a trench has a lengththat is substantially the same as its width, it can be referred to as ahole or a via. Holes or vias typically have a width of about 20 nm toabout 100 nm. In some embodiments, a trench has a depth of about 30 nmto about 100 nm, and typically of about 40 nm to about 60 nm. In someembodiments, a trench has an aspect ratio of about 2 to about 10, andtypically of about 2 to about 5. The dimensions of the trench may varydepending on process conditions, film composition, intended application,etc.

As used herein, the term “lateral space” may refer to an opening in asemiconductor substrate which is in fluid connection with its surface,and for which there exists no straight path to the wafer surface whichis perpendicular to the wafer plane. In other words, a lateral spacerefers to a sub-surface space in a semiconductor wafer. Stated yetdifferently, a lateral space is an opening which is covered, but notcompletely enclosed, by a substrate. For example, FIG. 3 shows a teststructure comprising a lateral space (130) which is filled with a gapfilling fluid. The trench (140) shown in FIG. 3 is not a lateral spacebecause it is not covered by a substrate surface. A lateral space can befilled with a gap filling fluid according to the methods describedherein. Alternatively, a “lateral space” can also be named a “buriedlateral layer,” a “buried layer,” a “buried space,” a “buried lateralspace,” a “capped space,” or a like term.

As used herein, the term “height” may refer to the extent of a featurein a plane perpendicular to the surface of the substrate that comprisesthe feature in question.

As used herein, the term “width” may refer to the extent of a feature ina direction in a plane parallel to the surface of the substrate thatcomprises the feature in question.

As used herein, the term “length” may refer to the extent of a featurein a direction in a plane parallel to the surface of the substrate thatcomprises the feature in question. The directions in which the “width”and the “length” are measured are mutually perpendicular. It shall beunderstood that all dimensions, including length, width, and height of astructure, can be measured using routine techniques such as scanningtunneling electron microscopy (STEM).

As used herein, the term “lateral” may refer to a feature or directionthat extents in the plane of the substrate that comprises the feature inquestion.

As used herein, the expression “lateral direction” may refer to adirection that extends in a direction of the plane of the wafer.

An object of the present invention is to provide a method for forming afilm comprising silicon, nitrogen, and optionally carbon that hasfilling capability. Also provided are films resulting from such amethod, and structures including such films. In some embodiments, thefilling capability can be accomplished by forming a viscous material ina gas phase by striking, for example, an N₂ and/or NH₃ plasma, in achamber filled with a volatile precursor that can be polymerized withincertain parameter ranges. Optionally the gas phase comprises a furthergas apart from N₂ and/or NH₃, for example a noble gas or H₂. Theparameters can include, for example, partial pressure of precursorduring a plasma strike and wafer temperature. As used herein,polymerization can include formation of a longer molecule and need notnecessarily include a carbon-carbon bond. Indeed, polymerization caninclude formation of for example Si—Si bonds, Si—C bonds, and/or Si—Nbonds. The viscous material forms a viscous phase on the bottom of asubstrate and is capable of flowing in a trench on that substrate.Suitable substrates include silicon wafers. As a result, the viscousmaterial seamlessly fills the trench in a bottom-up way.

Flowable films may be temporarily obtained when a volatile precursor,for example an alkylsilane or the like, is polymerized by a plasma anddeposited on a surface of a substrate, wherein gaseous precursor (e.g.,monomer) is activated or fragmented by energy provided by plasma gasdischarge so as to initiate polymerization, and when the resultantmaterial is deposited on the surface of the substrate, the materialshows temporarily flowable behavior. In accordance with exemplaryembodiments, when the deposition step is complete, the flowable film isno longer flowable but is solidified, and thus, a separatesolidification process is not required. In other embodiments, theflowable film is densified and/or solidified after deposition.

The gap filling fluids that are deposited herein may comprise hydrogen,though there is no requirement that they do so. In some embodiments, thegap filling fluids that are deposited herein comprise between 0.1% and10.0%, or between 0.2% and 5.0%, or between 0.5% and 2.5%, or between1.0% and 2.0% hydrogen, wherein all percentages are given in atomicpercent. Hence, when, for example, a gap filling fluid is referred to asSiCN, the breath of the term “SiCN” is intended to encompass SiCN:H,i.e., SiCN comprising hydrogen, e.g., up to 10 atomic percent hydrogen.

In some embodiments, a volatile precursor is polymerized within acertain parameter range mainly defined by partial pressure of precursorduring a plasma strike, wafer temperature, and total pressure in thereaction chamber. In order to adjust the “precursor partial pressure,”an indirect process knob (dilution gas flow) may be used to control theprecursor partial pressure. The absolute number of precursor partialpressure may not be required in order to control flowability ofdeposited film, and instead, a ratio of flow rate of precursor to flowrate of the remaining gas and the total pressure in the reaction spaceat a reference temperature can be used as practical control parameters.

A gap in a substrate may refer to a patterned recess or trench in asubstrate. Accordingly, exemplary methods of filling a patterned recessor trench on a substrate include providing a substrate comprising therecess/trench in a reaction space, providing a precursor to the reactionspace, thereby filling the recess with the precursor, and providing aplasma to form a viscous phase of the precursor in the recess, whereinthe viscous phase of the precursor flows and deposits or forms depositedmaterial in the bottom portion of the recess relative to sidewallsand/or a top portion of the substrate away from the recess.

The present methods are particularly applicable for filling gapscomprising lateral spaces which are in fluid connection with recesses.Thus, provided herein is a method for manufacturing a structure. Thestructure comprises a substrate which in turn comprises a plurality ofrecesses and a plurality of lateral spaces. The substrate preferablycomprises a semiconductor. Suitable substrates include semiconductorwafers, for example silicon wafers. The plurality of recesses are influid connection with one or more lateral spaces. The method comprisesthe step of at least partially filling the plurality of recesses and theone or more lateral spaces with a gap filling fluid.

Alternatively or additionally, provided herein are methods for filling agap by means of a gap filling fluid. These methods comprise introducinga substrate in a reactor chamber. The substrate is provided with a gap.The gap comprises a recess and a lateral space extending substantiallylaterally from the recess. After the substrate has been introduced inthe chamber, the method includes introducing a precursor into thereactor chamber as well as introducing a co-reactant into the reactorchamber. The method further comprises creating a plasma in the reactorchamber. Upon application of the plasma, the precursor and theco-reactant react to form a gap filling fluid that at least partiallyfills the recess and the lateral space of the gap.

Thus gaps comprising lateral spaces in a substrate can be effectivelyfilled.

In some embodiments, present methods include the use of a radiofrequency (RF) plasma and make used of pulsed precursor flow and apulsed RF plasma. Preferably, the precursor pulses and the plasma pulsesare separated by purge gas pulses. Preferably, the co-reactant is usedas a purge gas. In such embodiments, the desired aspects for flowabilityof depositing film include: 1) high enough partial pressure during theentire RF-on period for polymerization to progress; 2) sufficient energyto activate the reaction (defined by the RF-on period and RF power),during an RF period which is not too long; and 3) temperature andpressure for polymerization/chain growth set above the melting point andbelow the boiling point of the flowable phase.

In some embodiments, the process of filling a gap with a gap fillingfluid comprises the following sub-steps. In step a., a substratecomprising the gap is positioned in a reactor chamber. The gap comprisesa recess in fluid connection with one or more lateral spaces. Step b.includes introducing a precursor into the reactor. Step c. includesintroducing a gas mixture comprising one or more further gases into thereactor. The gas mixture comprising the one or more further gasescomprises the co-reactant. In some embodiments, the gas mixturecomprising the one or more further gases consists of the co-reactant.Step d. includes maintaining a plasma in the reactor. Step e. includesreacting the precursor on the one hand and the nitrogen and/or ammoniaon the other hand to form a gap filling fluid on the substrate. Step f.includes allowing the gap filling fluid to at least partially fill theplurality of recesses and the one or more lateral spaces.

In some embodiments, steps b and c occur simultaneously.

In some embodiments, step b precedes step c, and step c precedes step d.

In some embodiments, step c precedes step b, and step b precedes step d.

In some embodiments, all of steps b, c, and d are carried outconcurrently.

It shall be understood that when steps b, c, and/or d are carried out ina sequential manner, i.e., cyclically, a small amount of material may bedeposited each cycle and the sequence of steps may be repeated until alayer with a desired thickness is obtained.

In some embodiments, the process is carried out cyclically and steps band d are separated by purge gas pulses.

In some embodiments, neither the precursor nor the co-reactant containsany chalcogens or halogens. Preferably, neither the precursor nor theco-reactant comprises oxygen or chlorine.

In some embodiments, the present methods involve providing the precursorintermittently to the reaction space, and continuously applying aplasma. In some embodiments, the present methods involve providing theprecursor intermittently to the reaction space, and intermittentlyapplying a plasma. The latter embodiments thus feature the sequentialapplication of precursor pulses and plasma pulses to the reaction space.Preferably, the precursor pulses and the plasma pulses are separated bypurge gas pulses.

In some embodiments, the present methods involve providing the precursorcontinuously to the reaction space, and continuously or cyclicallyapplying a plasma, e.g., through application of RF power, throughout thedeposition step. The plasma may be continuous or pulsed, and it may bedirect or remote.

In a preferred mode of operation, the flowable film is deposited byemploying alternating precursor and plasma pulses.

In some embodiments, a pulsed plasma, e.g., a pulsed RF plasma isapplied. In some embodiments, the period of RF power application (i.e.,the period in which reactants in the reactor are exposed to plasma) isin the range of at least 0.7 seconds to at most 2.0 seconds, for examplefrom at least 0.7 seconds to at most 1.5 seconds.

In some embodiments, the plasma exposure time is adjusted by changingthe distance between upper and lower electrodes. Indeed, by increasingthis distance, the retention time by which the precursor is retained inthe reaction space between upper and lower electrodes is prolonged whenthe flow rate of precursor entering into the reaction space is keptconstant. In some embodiments, the distance between the upper and lowerelectrodes is from at least 5.0 mm to at most mm, or from at least 10.0mm to at most 25.0 mm, or from at least 15.0 mm to at most 20.0 mm.

In some embodiments, the plasma is RF plasma. In some embodiments, RFpower is provided at a frequency of 13.56 MHz. In some embodiments, theRF power provided for flowable film deposition is from at least 50 W toat most 1000 W, or from at least 100 W to at most 900 W, or from atleast 200 W to at most 800 W, or from at least 300 W to at most 700 W,or from at least 400 W to at most 600 W, or from at least 500 W to atmost 550 W. It shall be understood that these powers are provided forthe special case of 300 mm wafers. They can be readily converted tounits of W/cm² to obtain equivalent RF power values for different wafersizes.

In preferred embodiments, the present methods involve providing theprecursor in a pulse, and involve providing the RF power in a furtherpulse, wherein the two pulses do not overlap. Preferably, the precursorpulses and the plasma pulses are separated by purge gas pulses. Thus, insome embodiments, the method for filling a gap comprises a plurality ofdeposition cycles comprising alternating pulses in which precursor isprovided, and pulses in which RF power is provided for generating aplasma. Preferably, these precursor pulses and plasma pulses areseparated by purge pulses in which a purge gas is flowed. In thefollowing paragraphs, process conditions are given for a reactor chambervolume of 1 liter and for 300 mm wafers. The skilled person understandsthat these values can be readily extended to other reactor chambervolumes and wafer sizes.

In some embodiments, the method for filling a gap comprises from atleast 10 to at most 300 deposition cycles, or from at least 20 to atmost 200 deposition cycles, or from at least 50 to at most 150deposition cycles, or from at least 75 to at most 125 deposition cycles,for example 100 deposition cycles. When ammonia and/or NH₃ is used asco-reactant, the method for filling a gap preferably comprises from atleast 10 to at most 125 deposition cycles, or from at least 25 to atmost 100 deposition cycles, or from at least 50 to at most 75 depositioncycles. When Ar is used as a co-reactant, the method for filling a gappreferably comprises from at least 25 to at most 300 deposition cycles,or from at least 50 to at most 250 deposition cycles, or from at least100 to at most 200 deposition cycles, for example 150 deposition cycles.

In some embodiments, the co-reactant is supplied to the reactor chamberas a carrier gas, i.e., as a gas that entrains the precursor, and/or asan additional gas. In some embodiments, the carrier gas is provided at aflow rate of at least 0.2 to at most 2.0 slpm, or from at least 0.3 toat most 1.5 slpm, or from at least 0.4 to at most 1.0 slpm, or from atleast 0.5 to at most 0.7 slpm. In some embodiments, the co-reactantconsists of NH₃ and/or N₂. Preferably, N₂ is used as a carrier gas. N₂carrier gas is preferably provided at a flow rate of at least 0.2 to atmost 2.0 slpm, or from at least 0.3 to at most 1.5 slpm, or from atleast 0.4 to at most 1.0 slpm, or from at least 0.5 to at most 0.7 slpm.In some embodiments, the co-reactant consists of a noble gas, preferablyAr, and the carrier gas is provided at a flow rate of at least 0.2 slpmto at most 2.0 slpm, or from at least 0.3 slpm to at most 1.5 slpm, orfrom at least 0.4 slpm to at most 1.0 slpm, or at a flow rate of atleast 0.6 slpm to at most 0.8 slpm.

In some embodiments, an additional N₂ flow is provided to the reactorchamber above and beyond the N₂ which is used as a carrier gas. In someembodiments, this additional N₂ flow is from at least 0.1 slpm to atmost 2.0 slpm, or from at least 0.2 slpm to at most 1.5 slpm, or from atleast 0.3 slpm to at most 1.0 slpm, or from at least 0.4 slpm to at most0.6 slpm.

Preferably, NH₃ is used not as a carrier gas, but as an additionalco-reactant that is separately provided to the reactor chamber. In someembodiments, NH₃ is provided at a flow rate of at least 0.1 slpm to 0.5slpm, or at a flow rate of at least 0.15 slpm to at most 0.3 slpm.

In some embodiments, the pressure in the reactor chamber is from atleast 700 Pa to at most 2000 Pa, or from at least 1000 Pa to at most1800 Pa, or from at least 1300 Pa to at most 1500 Pa. This pressurerange applies both when NH₃/N₂ is used as a carrier gas, and when anoble gas such as Ar is used as a carrier gas.

In some embodiments, the plasma is an RF plasma. In some embodiments,the RF power used is from at least 50 W to at most 1000 W, or from atleast 75 W to at most 500 W, or from at least 100 W to at most 300 W, orfrom at least 150 W to at most 200 W. When NH₃ and/or N₂ is used as a coreactant, the RF power is from at least 200 W to at most 800 W, or fromat least 250 W to at most 700 W, or from at least 300 W to at most 600W, or from at least 400 W to at most 500 W. When Ar is used as aco-reactant, the RF power is preferably from at least 50 W to at most200 W, or from at least 75 W to at most 150 W, or rom at least 100 W toat most 125 W.

In some embodiments, the distance between the electrodes used forgenerating the RF plasma is from at least 5 mm to at most 20 mm, or fromat least 7 mm to at most 15 mm.

In some embodiments, the deposition cycles consist of a sequence of aprecursor pulse, a precursor purge, a plasma pulse, and a post plasmapurge, which are continually repeated.

In some embodiments, the duration of the precursor pulse, i.e., theprecursor feed time, is from at least 0.25 s to at most 4.0 s, or fromat least 0.5 s to at most 2.0 s, or from at least 1.0 s to at most 1.5s. When a noble gas such as Ar is used as a co-reactant, the precursorfeed time is preferably from at least 0.5 s to at most 1.5 s, forexample 1.0 s. When NH₃ and/or N₂ are used as co-reactant, the precursorfeed time is preferably from at least 0.25 s to at most 4.0 s, or fromat least 0.5 s to at most 2.0 s, or from at least 1.0 s to at most 1.5s.

In some embodiments, the duration of the purge step directly after theprecursor pulse, i.e., the precursor purge time, is from at least 0.025s to at most 2.0 s, or from at least 0.05 s to at most 0.8 s, or from atleast 0.1 s to at most 0.4 s, or from at least 0.2 s to at most 0.3 s.This timing applies both for the case when N₂ and/or NH₃ is used as aco-reactant, and when a noble gas such as Ar is used as a co-reactant.

In some embodiments, the RF on time, i.e., the duration of a plasmapulse, that is the time during which RF power is provided during aplasma pulse, is from at least 0.5 s to at most 4.0 s, or from at least0.7 s to at most 3.0 s, or from at least 1.0 s to at most 2.0 s, or fromat least 1.25 s to at most 1.75 s, or of about 1.5 s. When N₂ and/or NH₃is used as a co-reactant, the duration of a plasma pulse is preferablyfrom at least 0.75 to at most 3.0 s, or from at least 1.0 to at most 2.0s.

In some embodiments, the post plasma purge time, i.e., the duration ofthe purge which occurs after application of a plasma pulse, is from atleast 0.5 s to at most 2.0 s, or from at least 0.75 to at most 1.5 s, orfrom at least 0.9 to at most 1.1 s, for example 1.0 s.

In some embodiments, the substrate rests on a susceptor in the reactorchamber during the deposition cycles, and the susceptor temperature isfrom at least 50° C. to at most 100° C., or from at least 60° C. to atmost 80° C., or from at least 65° C. to at most 75° C.

The presently provided gap filling fluids spontaneously solidify afterdeposition through recombination. Therefore, no separate cooling step isnecessary. Nevertheless, a curing step, e.g., a plasma curing step canbe advantageous in order to improve one or more advantageous filmproperties such as resistance to shrinkage at high temperature and a lowwet etch rate.

Accordingly, in some embodiments, the method includes a step of curingthe gap filling fluid. This step increases the thermal resistance of thegap filling fluid. In other words, it increases the resistance of thegap filling fluid against deformation and/or mass loss at elevatedtemperatures. Additionally or alternatively, the curing step may causethe gap filling fluid to solidify.

In some embodiments, the method further comprises, after completion ofthe deposition of the film having filling capability, exposing thesubstrate to a plasma as a post-deposition treatment. Additionally oralternatively, a periodic plasma can be applied. Additionally oralternatively, a H₂ plasma, a He plasma, a Hz/He plasma, an Ar plasma,an Ar/H₂ plasma, or an Ar/He/H₂ plasma treatment is applied. Optionally,the gap filling fluid is subjected to an anneal after the gap fillingfluid has been deposited and before the curing step. Suitable annealingtimes include from at least 10.0 seconds to at most 10.0 minutes, forexample from at least 20.0 seconds to at most 5.0 minutes, for examplefrom at least 40.0 seconds to at most 2.5 minutes. Suitably, the annealis performed in a gas mixture comprising one or more gasses selectedfrom the list consisting of N₂, He, Ar, and H₂. Preferably, the annealis carried out in an atmosphere that comprises N₂. In some embodiments,the anneal is carried out at a temperature of at least 200° C., or at atemperature of at least 250° C., or at a temperature of at least 300°C., or at a temperature of at least 350° C., or at a temperature of atleast 400° C., or at a temperature of at least 450° C.

Alternatively or additionally, solidification may occur upon contactwith a substrate wherein this reaction is activated thermally. As forprecursor gas ratio, a high precursor gas ratio is preferable forflowability, since under a low precursor partial pressure, althoughpolymerization may occur, supply is too low to form polymer chains,which are long enough to flow, i.e., long enough to exhibit liquid-likebehavior.

In some embodiments, the cured gap filling fluid is an SiCN layer. AnSiCN layer may consist essentially of silicon, carbon, nitrogen, andoptionally hydrogen. In some embodiments, the SiCN layer comprises morethan 5 wt. % N, for example from at least 8.0 wt % N to at most 20.0 wt.% N, or from at least 10.0 wt. % N to at most 18.0 wt. % N, or from atleast 12.0 wt. N to at most 15.0 wt. % N. These compositions areprovided here as measured by means of Rutherford BackscatteringSpectroscopy (RBS).

In some embodiments, the SiCN layer is oxidized after it has beendeposited, for example in an O₂ plasma.

In some embodiments, the gap filling fluid is SiCN, and the gap fillingfluid is subjected to an oxidation, for example in an O₂ plasma, afterit has been deposited. Optionally, the oxidation step is carried outafter the gap filling fluid has been cured. This is an advantageous wayof obtaining an SiO₂ layer.

In some embodiments, the step of curing involves the use of a cyclicplasma treatment. When a cyclic plasma treatment is performed,deposition cycles and plasma curing cycles are alternated. The term“plasma curing cycle” refers to a plasma treatment step in which gapfilling fluid is cured. In some embodiments, the cyclic plasma treatmentinvolves the use of a gas mixture that does not comprise nitrogen.

In some embodiments, the cyclic plasma treatment, employs a directplasma. In such embodiments, the process of filling a gap preferablycomprises a plurality of cycles, i.e., plasma curing cycles, in whichgap filling fluid deposition and plasma treatment steps are alternated.Such a cyclic process has the advantage that the a larger portion of thegap filling fluid is cured: a direct plasma typically has a penetrationdepth of around 2 to 7 nm, such that a post deposition direct plasmatreatment would only cure a top layer of the gap filling fluid.Conversely, alternating deposition and plasma steps allows curing alarger part, or even the entirety of the gap filling fluid. Note thatentire curing of the gap filling fluid by a cyclic plasma treatment doesnot occur in case the lateral spaces extend for a large lateraldistance, e.g., for a lateral distance of 10.0 μm or more. This is notnecessarily a problem since in many applications, potentially uncuredparts of the gap filling fluid are encapsulated by cured gap fillingfluid in the recess and the walls of the lateral space. In someembodiments, the direct plasma is a He plasma applied at a pressure of600.0 Pa, for 20.0 s. When used to treat gap filling fluid on 300 mmwafers, a plasma power of 200 W is suitable.

In some embodiments, the step of curing involves the use of a remoteplasma. The radicals produced by remote plasmas feature a penetrationdepth which is significantly higher than that offered by direct plasmas,e.g., significantly higher than the size of the gaps to be filled bymeans of the presently provided methods. Consequently, a remote plasmatreatment may be advantageously applied once after all the gap fillingfluid has been deposited. This notwithstanding, a remote plasma cure mayalso be applied cyclically with alternating plasma cure and gap fillingfluid deposition steps, similar to the operation with a direct plasma.The large penetration depths of remote plasmas has the advantage thatthey allow efficient curing of gap filling fluid inside lateral spaces.In some embodiments, the plasma gas employed in a remote plasmacomprises a noble gas, for example a noble gas selected from the listconsisting of He and Ar.

In some embodiments, the cyclic plasma treatment involves the use of Arand/or He as a plasma gas. In some embodiments, the cyclic plasma curingis used together with flowable gap filling fluids derived from siliconalkylamine precursors, for example silicon alkylamine precursors thatare used together with co-reactants selected from the list consisting ofAr, N₂, and He. These gap filling fluids have excellent properties.

In some embodiments, the step of curing involves the use of a micropulsed plasma. A micro pulsed plasma is a plasma treatment thatcomprises the application of a plurality of rapidly succeeding on-offmicro pulses. In other words, in some embodiments, the micro pulsedplasma comprises subjecting the substrate to a micro pulsed plasmacomprising a plurality of micro pulse cycles, a micro pulse cyclecomprising a plasma on pulse and a plasma off pulse.

In some embodiments, the presently described methods comprise aplurality of alternating cycles, a cycle comprising a gap filling fluiddeposition step and a curing step, wherein the curing step comprisessubjecting the substrate to a direct plasma. Suitably, the direct plasmais a noble gas plasma. In other words, and in some embodiments, thedirect plasma employs a noble gas such as Ar as a plasma gas. In someembodiments, the curing step comprises subjecting the substrate to amicro pulsed plasma comprising a plurality of micro pulse cycles, amicro pulse cycle comprising a plasma on pulse and a plasma off pulse.

For example, the on micro pulses in a micro pulsed plasma may last fromat least 1.0 us to at most 1.0 s, or from at least 2.0 us to at most0.50 s, or from at least 5.0 us to at most 250 ms, or from at least 10.0is to at most 100.0 ms, or from at least 25.0 is to at most 50.0 ms, orfrom at least 50.0 is to at most 25.0 ms, or from at least 100.0 is toat most 10.0 ms, or from at least 250.0 is to at most 5.0 ms, or from atleast 0.50 ms to at most 2.5 ms. For example, the off micro pulses in amicro pulsed plasma may last from at least 1.0 us to at most 2.0 s, orfrom at least 2.0 us to at most 1.0 s, or from at least 5.0 us to atmost 500 ms, or from at least 10.0 us to at most 250.0 ms, or from atleast 25.0 is to at most 100.0 ms, or from at least 50.0 is to at most50.0 ms, or from at least 100.0 is to at most 25.0 ms, or from at least200.0 is to at most 10.0 ms, or from at least 500.0 is to at most 5.0ms, or from at least 1.0 ms to at most 2.0 ms. A micro pulsed plasma maybe used cyclically and/or as a post-deposition treatment. In otherwords, a process of filling a gap may feature alternating cycles of gapfilling fluid deposition and micro pulsed plasma. Additionally oralternatively, a micro pulsed plasma may be applied as a post-depositiontreatment after all gap filling fluid has been deposited.

Preferably, a micro pulsed plasma is applied together with a plasma gasflow rate that is higher than a pre-determined threshold. Thecombination of a micro pulsed plasma with these high flow ratesminimizes redeposition of volatile by products released duringplasma-induced cross linking of the deposited gap filling fluid. In someembodiments, the flow rate of the plasma gas during micro pulsed plasmatreatment is at least 5.0 slm (standard liter per minute), preferably atleast 10.0 slm. The skilled artisan understands that this flow ratedepends on reactor chamber volume and substrate size, and the valuesprovided here for 300 mm wafers and a reactor chamber volume of 1 litercan be readily transferred to other substrate sizes and/or reactorvolumes. Preferably, a noble gas is used as a plasma gas during micropulsed plasma treatment. In some embodiments, the noble gas is selectedfrom the list consisting of He and Ar.

In some embodiments, the method includes entirely filling the pluralityof recesses with a gap filling fluid.

In some embodiments, the method includes entirely filling the one ormore lateral spaces with a gap filling fluid.

In some embodiments, the method includes filling the plurality ofrecesses and the one or more lateral spaces with gap filling fluidwithout the formation of voids. In other words, in some embodiments, thedeposition according to the present methods is continued until theplurality of recesses and the one or more lateral spaces are fullyfilled with the film having filling capability, and substantially novoids are formed in the filled recess. The presence of voids can beobserved by studying the formed films in a scanning transmissionelectron microscope.

In some embodiments, the co-reactant comprises nitrogen and/or ammonia.These one or more further gasses are commonly referred to asco-reactants.

In some embodiments, all gases supplied to the reaction space throughoutany one of steps b to f are the precursor, an optional carrier such asN₂, Ar, and/or He, and an optional plasma ignition gas which can be orinclude Ar, He, N₂, and/or H₂.

In some embodiments, no gasses other than the precursor, ammonia, andnitrogen are introduced into the reactor throughout steps a to f.

In some embodiments, the co-reactant consists of any one of Ar, He, Hz,or any combination thereof. In some embodiments, the co-reactantcomprises one or more gases which do not contain any nitrogen. Suchco-reactants yield particularly good results in combination with aprecursor selected from the list consisting of trisilylamine,dichlorosilane, trichlorosilane, and silicon alkylamines.

Silicon alkylamine precursors are particularly suitable to be usedtogether with a plasma which is fed with a co-reactant selected from thelist consisting of Ar, N₂, and He. Also, gap filling fluids resultingfrom depositions involving the use of these precursors and co-reactantsare preferably subjected to a curing step involving a cyclic plasmatreatment. In some embodiments, the cyclic plasma treatment involves theuse of a gas mixture that does not comprise nitrogen. In someembodiments, the cyclic plasma treatment involves the use of noblegasses. In some embodiments, the cyclic plasma treatment involves theuse of Ar and/or He.

In some embodiments, the precursor is selected from the list consistingof silazanes, cyclosilazanes, and silicon alkylamines. In someembodiments, the precursor is selected from the list consisting ofBis(diethylamino)silane, bisdimethylaminosilane, hexylethylaminosilane,tetraethylaminosilane, tertbutylaminosilane, bistert-butylaminosilena,bisdimethylaminodimethylaminosilane, heptametyhlsilazane,trimethysylyldiethylamine, trimethylsyledimethlamine,trimethyltoribinylcycletrisilazane, tristrimetylhydroxya mine,bisdimethylsaminomethylsilane, and dimetyhlsilyldimethlamine. Theseprecursors are particularly suitable to be used together with a plasmawhich is fed with a co-reactant selected from the list consisting of Ar,N₂, and He. Also, gap filling fluids resulting from depositionsinvolving the use of these precursors and co-reactants are preferablysubjected to a curing step, as described elsewhere herein.

Preferably, the precursor is a cyclosilazane precursor. Gapfill layersusing cyclosilazane precursors provide layers with particularly goodlateral flowability, i.e., particularly good flowability in lateralspaces.

In some embodiments, the cyclosilazane precursor does not contain anyoxygen.

In some embodiments, the cyclosilazane precursor does not contain anyhalogens.

In some embodiments, the cyclosilazane precursor is selected from thegroup consisting of a cyclotrisilazane precursor, a cyclotetrasilazaneprecursor, and a cyclopentasilazane precursor.

In some embodiments, the cyclosilazane precursor consists entirely of N,C, H, and Si. In some embodiments, the cyclosilazane precursor consistsentirely of N, C, and Si.

In some embodiments, the cyclosilazane precursor has the structure offormula (i):

Preferably, any one of R1 to R9 are each independently selected from thegroup consisting of hydrogen and C1 to C5 branched or linear alkyl,alkenyl, alkynyl, and alkylamine.

In some embodiments, the cyclosilazane precursor has the structure offormula (ii):

In some embodiments, the precursor comprises a trisilylamine (TSA). Sucha precursor is particularly suitable to be used together with plasmawhich is fed with a co-reactant selected from the list consisting of N₂,NH₃, Ar, and He. Preferably, the one or more further gasses comprise 1)any one of N₂ and NH₃, combined with 2) any one of Ar and He.

In some embodiments, the precursor comprises a silicon alkylamine. Forexample, a suitable precursor is tetra methyl disalazane.

Silicon alkylamine precursors may be particularly suitable to be usedtogether with a co-reactant selected from the list consisting of Ar, N₂,and He.

Without the present invention being bound by theory or any particularmode of operation, it is believed that the depositing material desirablyremains viscous or liquid throughout the deposition process and shouldnot readily solidify or evaporate. It is further believed that underdesirable reaction conditions, the vapor pressure of the liquid phase,but not that of the precursor, should be lower than total reactorpressure. Thus, it is believed that reactor temperature and pressureshould be maintained at conditions under which the flowable reactionproducts exist as a liquid, and the precursor exists as a gas.

In some embodiments, all of steps b to f occur at a pressure of at least500 Pa, preferably at a pressure of at least 700 Pa. More preferably,all of steps b to f occur at a pressure of at least 900 Pa. Thisenhances the gap filling properties of the presently provided gapfilling fluids.

In some embodiments, all of steps b to f occur at a temperature of atleast −50° C. to at most 200° C., preferably at a temperature of atleast 50° C. to at most 150° C. More preferably, all of steps b to foccur at a temperature of at least 50° C. to at most 75° C. Thisenhances the gap filling properties of the presently provided gapfilling fluids.

In some embodiments, all of steps b to f occur at a pressure of at least500 Pa to at most 10,000 Pa and at a temperature of at least −50° C. toat most 200° C. In some embodiments, all of steps b to f occur at apressure of at least 700 Pa and at a temperature of at least 50° C. toat most 150° C. Preferably, all of steps b to f occur at a pressure ofat least 900 Pa, and all of steps b to f occur at a temperature of atleast 50° C. to at most 75° C. This specific combination of temperaturesand pressures particularly enhances the gap filling properties of thepresently provided gap filling fluids.

In some embodiments, the substrate comprises a semiconductor. In someembodiments, the semiconductor comprises silicon.

Further provided herein is a structure comprising a semiconductorsubstrate comprising a plurality of recesses. The plurality of recessesare in fluid connection with one or more lateral spaces. Also, theplurality of recesses and the one or more lateral spaces are at leastpartially filled with a gap filling fluid.

In some embodiments, the gap filling fluid completely fills at least90%, preferably at least 95%, more preferably at least 99%, mostpreferably all of the plurality of recesses.

In some embodiments, the gap filling fluid completely fills at least90%, preferably at least 95%, more preferably at least 99%, mostpreferably all of the lateral spaces. In other words, the gap fillingfluid preferably fills the entirety of each lateral space that is to befilled with gap filling fluid.

In some embodiments, the gap filling fluid is substantially free ofvoids.

In some embodiments, the lateral spaces have a height of at least 1.0 nmto at most 40.0 nm, or at least 2.0 nm to at most 20.0 nm, or of atleast 3.0 nm to at most 18.0 nm, or of at least 4.0 nm to at most 16.0nm, or of at least 5.0 nm to at most 15.0 nm, or of at least 6.0 nm toat most 14.0 nm, or of at least 7.0 nm to at most 13.0 nm, or of atleast 8.0 nm to at most 12.0 nm, or of at least 9.0 nm to at most 11.0nm, or of about 10.0 nm.

In some embodiments, the gap filling fluid extends in the lateral spacefor a distance of at least 1.0 nm to at most 200.0 nm, or from at least1.5 nm to at most 150.0 nm, or from at least 2.0 nm to at most 100.0 nm,or from at least 2.5 nm to at most 50.0 nm, or from a distance of atleast 3.0 nm to at most 25.0 nm, or from a distance of at least 4.0 nmto at most 20.0 nm, or from a distance of at most 5.0 nm to at most 18.0nm, or from a distance of at least 6.0 nm to at most 16.0 nm, or from adistance of at least 7.0 nm to at most 14.0 nm, or from a distance of atleast 8.0 nm to at most 12.0 nm, or for a distance of about 10.0 nm.

In some embodiments, the gap filling fluid extends in the lateral spacefor a distance of at least 3 nm, or for a distance of at least 5.0 nm,or for a distance of at least 10.0 nm, or for a distance of at least 25nm, or for a distance of at least 50 nm, or for a distance of at least100 nm, or for a distance of at least 250 nm, or for a distance of atleast 500 nm, or for a distance of at least 1 μm.

In some embodiments, the recess has a depth of at least 5 nm to at most500 nm, or of at least 10 nm to at most 250 nm, or from at least 20 nmto at most 200 nm, or from at least 50 nm to at most 150 nm, or from atleast 100 nm to at most 150 nm.

In some embodiments, the recess has a width of at least 10 nm to at most10,000 nm, or of at least 20 nm to at most 5,000 nm, or from at least 40nm to at most 2,500 nm, or from at least 80 nm to at most 1000 nm, orfrom at least 100 nm to at most 500 nm, or from at least 150 nm to atmost 400 nm, or from at least 200 nm to at most 300 nm.

In some embodiments, the recess has a length of at least 10 nm to atmost 10,000 nm, or of at least 20 nm to at most 5,000 nm, or from atleast 40 nm to at most 2,500 nm, or from at least 80 nm to at most 1000nm, or from at least 100 nm to at most 500 nm, or from at least 150 nmto at most 400 nm, or from at least 200 nm to at most 300 nm.

In some embodiments, the gap filling fluid extends into a particularrecess for a distance that equals from at least 1.0 to at most 10.0times the height of the recess. In some embodiments, the gap fillingfluid extends into a particular recess for a distance that equals fromat least 1.5 to at most 9.0 times the height of the recess. In someembodiments, the gap filling fluid extends into a particular recess fora distance that equals from at least 2.0 to at most 8.0 times the heightof the recess. In some embodiments, the gap filling fluid extends into aparticular recess for a distance that equals from at least 3.0 to atmost 6.0 times the height of the recess. In some embodiments, the gapfilling fluid extends into a particular recess for a distance thatequals from at least 4.0 to at most 6.0 times the height of the recess.In some embodiments, the gap filling fluid extends into a particularrecess for a distance that equals about 5.0 times the height of therecess.

In some embodiments, the gap filling fluid comprises a polysilazaneoligomer.

In some embodiments, the polysilazane oligomer is branched.

In some embodiments, the polysilazane oligomer comprises a plurality ofoligomeric species.

In some embodiments, the structure comprises a plurality of lateralspaces, wherein the lateral spaces are present in the source and/ordrain regions of gate-all-around transistors, and wherein the gapfilling fluid serves as an interlayer dielectric.

In some embodiments, the gap filling fluid is cured. The term “curing”refers a process of cross linking of as-deposited gap filling fluidoligomers. Suitable means of curing include plasma curing processes asdescribed herein.

In some embodiments, the cured gap filling fluid consists entirely ofSi, N, H, and C. In some embodiments, the cured gap filling fluidconsists entirely of Si, N, and C.

Preferably, the cured gap filling fluid is a thermoset resin.

Further provided is a structure formed by a method as described herein.

The present methods and structures involve the manufacture and/or theprovision of a gap filling fluid. Such a gap filling fluid, i.e., afluid having filling capability, can be applied to various semiconductordevices including, but not limited to, cell isolation in 3D cross pointmemory devices, self-aligned via, dummy gate (replacement of currentpoly Si), reverse tone patterning, PC RAM isolation, cut hard mask, andDRAM storage node contact (SNC) isolation.

Further provided is a gate all around transistor comprising a gapfilling fluid as an interlayer dielectric.

In some embodiments, the gap filling fluid is cured, preferably, the gapfilling fluid is cured by means of a method as described herein.

Further provided is the use of a gap filling fluid as an interlayerdielectric in a gate all around transistor. Gate All Around transistorsand interlayer dielectrics as such are known in the art, and aredescribed, for example, in U.S. Pat. No. 9,087,915.

Further provided is the use of a cured gap filling fluid as aninterlayer dielectric in a gate all around transistor.

Further provided is a system configured to perform a method as describedherein and/or configured to form a structure as described herein.

Further provided is a system comprising: one or more reaction chambers;a gas injection system fluidly coupled to at least one of the one ormore reaction chambers; a first gas source for introducing a precursorand optionally a carrier gas in one or more reactor chambers; a secondgas source for introducing a mixture of one or more further gasses intoone or more reactor chambers; an exhaust; and a controller, wherein thecontroller is configured to control gas flow into the gas injectionsystem to carry out a method as described herein.

In some embodiments, the gas injection system comprises a precursordelivery system that employs a carrier gas for carrying the precursor toone or more reactor chambers. In some embodiments, continuous flow ofcarrier gas is accomplished using a flow-pass system, wherein a carriergas line is provided with a detour line having a precursor reservoir(bottle), and the main line and the detour line are switched, whereinwhen only a carrier gas is intended to be fed to a reaction chamber, thedetour line is closed, whereas when both the carrier gas and theprecursor gas are intended to be fed to the reaction chamber, the mainline is closed and the carrier gas flows through the detour line andflows out from the bottle together with the precursor gas. In this way,the carrier gas can continuously flow into the reaction chamber and cancarry the precursor gas in pulses by switching the main line and thedetour line.

The skilled artisan will appreciate that the apparatus includes one ormore controller(s) (not shown) programmed or otherwise configured tocause the deposition and reactor cleaning process described elsewhereherein to be conducted. The controller(s) are communicated with thevarious power sources, heating systems, pumps, robotics, and gas flowcontrollers or valves of the reactor, as will be appreciated by theskilled artisan.

In the present disclosure, where conditions and/or structures are notspecified, the skilled artisan in the art can readily provide suchconditions and/or structures in view of the present disclosure, as amatter of routine experimentation.

The example embodiments of the disclosure described herein not limit thescope of the invention, since these embodiments are merely examples ofthe embodiments of the invention, which is defined by the appendedclaims and their legal equivalents. Any equivalent embodiments areintended to be within the scope of this invention. Indeed, variousmodifications of the disclosure, in addition to those shown anddescribed herein, such as alternative useful combinations of theelements described, may become apparent to those skilled in the art fromthe description. Such modifications and embodiments are also intended tofall within the scope of the appended claims.

As an example of a use case, the present gap fill layer can be used asan interlayer in gate all around transistors.

As an example of another use case, the present gap fill layer can beused as a dielectric filling layer above self-aligned contacts.

The presently provided methods may be executed in any suitableapparatus, including in a reactor as shown in FIG. 1 . Similarly, thepresently provided structures may be manufactured in any suitableapparatus, including a reactor as shown in FIG. 1 . FIG. 1 is aschematic view of a PEALD apparatus, desirably in conjunction withcontrols programmed to conduct the sequences described below, usable insome embodiments of the present invention. In this figure, by providinga pair of electrically conductive flat-plate electrodes (2,4) inparallel and facing each other in the interior (11) (reaction zone) of areaction chamber (3), applying RF power (e.g., at 13.56 MHz or 27 MHz)from a power source (25) to one side, and electrically grounding theother side (12), a plasma is excited between the electrodes. Atemperature regulator may be provided in a lower stage (2), i.e., thelower electrode. A substrate (1) is placed thereon and its temperatureis kept constant at a given temperature. The upper electrode (4) canserve as a shower plate as well, and a reactant gas and/or a dilutiongas, if any, as well as a precursor gas can be introduced into thereaction chamber (3) through a gas line (21) and a gas line (22),respectively, and through the shower plate (4). Additionally, in thereaction chamber (3), a circular duct (13) with an exhaust line (17) isprovided, through which the gas in the interior (11) of the reactionchamber (3) is exhausted. Additionally, a transfer chamber (5) isdisposed below the reaction chamber (3) and is provided with a gas sealline (24) to introduce seal gas into the interior (11) of the reactionchamber (3) via the interior (16) of the transfer chamber (5) wherein aseparation plate (14) for separating the reaction zone and the transferzone is provided. Note that a gate valve through which a wafer may betransferred into or from the transfer chamber (5) is omitted from thisfigure. The transfer chamber is also provided with an exhaust line (6).In some embodiments, the deposition of multi-element film and surfacetreatment are performed in the same reaction space, so that all thesteps can continuously be conducted without exposing the substrate toair or other oxygen-containing atmosphere.

In some embodiments, the apparatus depicted in FIG. 1 , the system ofswitching flow of an inactive gas and flow of a precursor gasillustrated in FIG. 2 can be used to introduce the precursor gas inpulses without substantially fluctuating pressure of the reactionchamber.

Indeed, a continuous flow of the carrier gas can be accomplished using aflow-pass system (FPS) wherein a carrier gas line is provided with adetour line having a precursor reservoir (bottle), and the main line andthe detour line are switched, wherein when only a carrier gas isintended to be fed to a reaction chamber, the detour line is closed,whereas when both the carrier gas and a precursor gas are intended to befed to the reaction chamber, the main line is closed and the carrier gasflows through the detour line and flows out from the bottle togetherwith the precursor gas. In this way, the carrier gas can continuouslyflow into the reaction chamber and can carry the precursor gas in pulsesby switching the main line and the detour line. FIG. 2 illustrates aprecursor supply system using a flow-pass system (FPS) according to anembodiment of the present invention (black valves indicate that thevalves are closed). As shown in (a) in FIG. 2 , when feeding a precursorto a reaction chamber (not shown), first, a carrier gas such as Ar (orHe) flows through a gas line with valves b and c, and then enters abottle (reservoir) (20). The carrier gas flows out from the bottle (20)while carrying a precursor gas in an amount corresponding to a vaporpressure inside the bottle (20) and flows through a gas line with valvesf and e and is then fed to the reaction chamber together with theprecursor. In the above, valves a and d are closed. When feeding onlythe carrier gas (noble gas) to the reaction chamber, as shown in (b) inFIG. 2 , the carrier gas flows through the gas line with the valve awhile bypassing the bottle (20). In the above, valves b, c, d, e, and fare closed.

A skilled artisan will appreciate that the apparatus includes one ormore controller(s) (not shown) programmed or otherwise configured tocause the deposition and reactor cleaning process described elsewhereherein to be conducted. The controller(s) are communicated with thevarious power sources, heating systems, pumps, robotics and gas flowcontrollers or valves of the reactor, as will be appreciated by theskilled artisan.

Optionally, a dual chamber reactor can be used. A dual chamber reactorcomprises two sections or compartments for processing wafers disposedclose to each other. In such a dual chamber reactor, a reactant gas anda noble gas can be supplied through a shared line andprecursor-containing gases are provided by means of unshared lines.

In a further example, reference is made to FIG. 3 , which shows anexemplary test structure (100). The test structure was used todemonstrate the efficacy of a gap filling fluid, more particularly anSICN layer, with excellent lateral flowability. The SICN layer in thisexample comprises a plurality of branched polysilazane oligomericspecies. It was deposited using process conditions 2, as shown in Table1, and using the following precursor molecule:

TABLE 1 N₂ pre- pre- carrier N₂ cursor cursor RF- post top NH₃ gasReactor plasma electrode gas feed purge on purge susceptor top bottomGPC/ con- deposition flow flow pressure power gap flow time time timetime temp. GPC GPC bottom dition cycles (slpm) (slpm) (Pa) (W) (mm)(slpm) (s) (° C.) (nm/cycle) GPC 1 46 0 0.4 1000 300 15 0.5 2 0.2 1 1 650.03 1.1 0.03 2 63 0.2 0.4 1800 500 7 0.5 2 0.2 1 1 75 0.02 1.2 0.01 352 0.2 0.4 1800 500 15 0.5 1.25 0.2 2 1 75 0.02 1.63 0.01 4 15 0 0.71800 500 7 0.5 0.5 0.2 1 1 75 0.26 2.98 0.09 5 14 0 0.7 1800 500 15 0.52 0.2 2 1 75 0.04 1.47 0.03 6 79 0.2 0.7 1250 500 15 0.5 0.5 0.2 1 1 750.04 1.39 0.03 7 112 0.2 0.7 1800 300 7 0.5 2 0.2 2 1 75 0.01 0.85 0.02

In the test structure (100), gap filling fluid (110) fills a trench(140). Also, the gap filling fluid (100) fully fills a lateral space(130). The width w_(t) of the trench equals 210 nm. The height of thetrench (140) equals 445 nm. The height h_(t) of the lateral space (130)equals 36 nm. The width w_(v) of the lateral space (130) filled with gapfilling fluid (100) is 160 nm. This corresponds to the total width ofthe lateral space (130) and thus 160 nm is a lower limit of the lateralgap filling capability of the gap filling fluid used in this example,for a lateral space (130) with a height of 36 nm.

In a further example, reference is made to FIG. 4 . Process condition 3from Table 1 was used, it shows vertical filling capability in a narrowand high aspect ratio structure.

In a further example, reference is made to FIG. 5 . This figure showshow the thickness T_(t) of gap fill fluid deposited on the top of asample and the thickness T_(b) of gap fill fluid deposited in the bottomof a trench may be measured by means of thickness measurements usingscanning transmission electron microscopy (STEM) on a sample crosssection. The ratio of the thickness T_(t) of gap fill fluid deposited onthe top of the sample and the thickness T_(b) of gap fill fluiddeposited in the bottom of a trench yields the ratio of growth per cycleat the top of the sample and the growth per cycle at the bottom of thecycle. A value close to zero, or at least smaller than one, indicatesgood flowability.

In a further example, an exemplary method as provided herein isdiscussed. The method is directed to filling a gap in a silicon wafer.The gap comprises a recess and a lateral space in fluid connection withthe recess. The method comprises at least partially filling the recessand the lateral space with a gap filling fluid. Preferably, recess andthe lateral space are entirely filled with the gap filling fluid.

At least partially filling the gap with a gap filling fluid maycomprise: introducing in a reactor chamber a substrate provided with agap, the gap comprising a recess and a lateral space extendingsubstantially laterally from the recess; introducing a precursor intothe reactor chamber; introducing a co-reactant into the reactor chamber;and, introducing a plasma in the reactor chamber; whereby the precursorand the co-reactant react to form a gap filling fluid in the recess andthe lateral space of the gap.

The co-reactant may comprise nitrogen and/or ammonia, and the precursormay be a cyclosilazane precursor that has a structure according to thefollowing formula:

wherein any one of R1 to R9 are each independently selected from thegroup consisting of hydrogen and C1 to C5 branched or linear alkyl,alkenyl, alkynyl, and alkylamine.

No gasses other than the cyclosilazane precursor, ammonia, and nitrogenmay be introduced into the reactor. Also, a pressure in the reactor maybe at least 900 Pa to at most 1,800 Pa and a temperature in the reactormay be at least 50° C. to at most 75° C.

Further provided herein is a structure comprising a semiconductorsubstrate comprising a plurality of recesses. The plurality of recessesare in fluid connection with one or more lateral spaces, and theplurality of recesses and the one or more lateral spaces are filled witha gap filling fluid which may be cured. The gap filling fluid issubstantially free of voids.

The lateral spaces may have a height of at least 1.0 nm to at most 40.0nm. The gap filling fluid may extend in the lateral space for a distanceof at least 5.0 nm. The recesses may have a depth of at least 5 nm to atmost 500 nm, a width of at least 10 nm to at most 10,000 nm, and alength of at least 10 nm to at most 10,000 nm.

The gap filling fluid may comprise a branched polysilazane oligomercomprising a plurality of oligomeric species. In other words, thebranched polysilazane oligomer may comprise a plurality differentmacromolecules that have a varying morphology.

As a further example, an exemplary curing step is discussed. The curingstep may employ a continuous direct plasma for 20 seconds. Gap fillingfluid deposition steps and this direct plasma curing step may be carriedout cyclically. This allows efficiently curing all, or at least a largeportion, of the gap filling fluid. For curing gap filling fluid in gapson a 300 mm substrate, each direct plasma curing step features 20seconds of He plasma at an RF power of 200 W and a working pressure of600 Pa. The reactor volume is ca. 1 liter and the He flow rate is 2 slm.

As a further example, another exemplary curing step is discussed. Thecuring step may involve the use of a micro pulsed plasma. In the presentexample, the curing step may be carried out cyclically, i.e.,alternating cycles of gap filling fluid deposition and micro pulsed RFplasma are employed, though a post-deposition micro plasma curingtreatment is possible as well. The application of cyclic gap fillingfluid deposition and plasma steps allows efficiently curing all, or atleast a large portion, of the gap filling fluid. For curing gap fillingfluid in gaps on a 300 mm substrate, each direct curing step may feature200 micropulses comprising 0.1 seconds of plasma on time and 0.5 secondsof plasma off time. The curing step may employ a He plasma at 400 Pa.The RF power provided may be 200 W. A He flow of 10 slm may be employed.

The gap filling fluid may comprise a branched polysilazane oligomercomprising a plurality of oligomeric species. In other words, thebranched polysilazane oligomer comprises a plurality of differentmacromolecules that may have a varying morphology.

In a further example, reference is made to FIG. 6 and Table 1.

FIG. 6 shows a deposition cycle sequence of an exemplary gap fillingfluid deposition process. The process may employ a gas mixtureconsisting of nitrogen and ammonia as a co-reactant. The co-reactant iscontinuously provided to the reactor chamber at a constant flow rate.Precursor pulses and RF on pulses may be applied sequentially, and maybe separated by purge pulses. Table 1 shows exemplary process conditionswhich yield particularly good results for 300 mm substrates. In thistable: the column “condition” shows process condition references; thecolumn “deposition cycles” shows the number of depositions cycles forevery process condition; the column “NH₃ flow” shows the ammonia flowrate in standard liters per minute (slpm) for each process condition;the column “N₂ carrier gas flow” shows the dinitrogen carrier gas flowrate, i.e., the flow rate of dinitrogen provided together with theprecursor, in slpm for each process condition; the column “reactorpressure” shows the reactor chamber pressure in Pa for each processcondition; the column “plasma power” shows the RF plasma used for eachprocess condition in W; the column “electrode gap” shows distancebetween the electrodes between which the RF plasma is generated, in mm;the column “N₂ gas flow” shows the gas flow rate of dinitrogen that isadditionally provided to the reactor chamber, above and beyond what isprovided as carrier gas, in slpm, and for each process condition; thecolumn “precursor feed time” shows the time in seconds during which theprecursor provided during each deposition cycle; the column “precursorpurge time” shows the time during which only the co-reactants, i.e., N₂and NH₃, are provided to the reactor chamber without the application ofplasma after each precursor feed pulse; the column “RF on time” showsthe time during which RF power is provided during each deposition cycle,for each process condition, in seconds; the column “post purge time”shows the time during which only the co-reactants, i.e., N₂ and NH₃, areprovided to the reactor chamber without the application of plasma aftereach plasma on pulse, in seconds; the column “top GPC” shows the topgrowth per cycle in nm/cycle, for each process condition; the column“bottom GPC” shows the bottom growth per cycle in nm/cycle, for eachprocess condition; the column “top GPC/bottom GPC” shows the ratio oftop growth per cycle and bottom growth per cycle for each processcondition.

FIG. 7 shows a deposition cycle sequence of an exemplary gap fillingfluid deposition process. The process employs a gas mixture consistingargon as a co-reactant. The co-reactant may be continuously provided tothe reactor chamber at a constant flow rate. Precursor pulses and RF onpulses are applied sequentially, and are separated by purge pulses.Table 2 shows exemplary process conditions which yield particularly goodresults for 300 mm substrates. In this table, the legends of the columnshave a similar meaning as those of Table 1, mutatis mutandis.

TABLE 2 Ar carrier precursor RF- post top gas Reactor plasma electrodeAr gas precursor purge on purge susceptor top bottom GPC/ depositionflow pressure power gap flow feed time time time time temp. GPC GPCbottom condition cycle (slpm) (Pa) (W) (mm) (slpm) (s) (° C.) (nm/cycle)GPC Ar.01 268 0.9 1800 75 7 0 1 0.2 0.7 1 65 0.01 0.23 0.04 Ar.02 39 0.41000 75 15 0 1 0.2 1.5 1 65 0.06 1.88 0.03 Ar.03 65 0.9 1400 75 15 0 10.2 1.5 1 65 0.03 1.44 0.02 Ar.04 98 0.9 1000 75 15 1 1 0.2 0.7 1 650.06 0.61 0.10 Ar.07 155 0.4 1400 150 15 1 1 0.2 1.5 1 75 0.14 2.41 0.06Ar.08 30 0.9 1400 150 15 0 1 0.2 0.7 1 75 0.03 0.22 0.14 Ar.10 38 0.91800 75 15 1 1 0.2 1.5 1 75 0.07 1.16 0.06 Ar.11 61 0.4 1400 150 7 0 10.2 1.5 1 75 0.07 0.87 0.08 Ar.13 59 0.9 1800 150 7 0 1 0.2 1.5 1 750.06 1.87 0.03

What is claimed is:
 1. A method of filling a gap comprising: introducingin a reactor chamber a substrate provided with a gap, the gap comprisinga recess and a lateral space extending substantially laterally from therecess; introducing a precursor into the reactor chamber; introducing aco-reactant into the reactor chamber; and, generating a plasma in thereactor chamber; whereby the precursor and the co-reactant react to forma gap filling fluid that at least partially fills the recess and thelateral space of the gap, wherein the method comprises a plurality ofcycles, a cycle comprising a gap filling fluid deposition step and acuring step, wherein the curing step comprises subjecting the substrateto a direct plasma; and wherein the curing step comprises subjecting thesubstrate to a micro pulsed plasma comprising a plurality of micro pulsecycles, a micro pulse cycle comprising a plasma on pulse and a plasmaoff pulse.
 2. The method according to claim 1, wherein the co-reactantcomprises at least one of nitrogen and ammonia.
 3. The method accordingto claim 1, wherein the co-reactant comprises a noble gas.
 4. The methodaccording to claim 3, wherein the noble gas comprises Ar.
 5. The methodaccording to claim 1, wherein the precursor comprises a cyclosilazaneprecursor.
 6. The method according to claim 5, wherein the cyclosilazaneprecursor is selected from the group consisting of a cyclotrisilazaneprecursor, a cyclotetrasilazane precursor, and a cyclopentasilazaneprecursor.
 7. The method according to claim 5, wherein the cyclosilazaneprecursor has the structure of formula (i):

wherein any one of R1 to R9 are each independently selected from thegroup consisting of hydrogen and C1 to C5 branched or linear alkyl,alkenyl, alkynyl, and alkylamine.
 8. The method according to claim 5,wherein the cyclosilazane precursor does not contain any oxygen.
 9. Themethod according to claim 5, wherein the cyclosilazane precursor doesnot contain any halogens.
 10. The method according to claim 1, whereinthe reactor chamber is maintained at a pressure of at least 900 Pa to atmost 1200 Pa.
 11. The method according to claim 1, wherein the reactorchamber is maintained at a temperature of at least 50° C. to at most 75°C.
 12. The method according to claim 1, wherein introducing theprecursor and the co-reactant occurs simultaneously.
 13. The methodaccording to claim 1, wherein the co-reactant is provided continuously,wherein the precursor is provided in a plurality of precursor pulses,wherein the plasma is generated in a plurality of plasma pulses, andwherein the precursor pulses and the plasma pulses are separated bypurge steps.
 14. The method according to claim 1, wherein no gassesother than the cyclosilazane precursor, ammonia, and nitrogen areintroduced into the reactor chamber while introducing the precursor,introducing the co-reactant, and generating the plasma.
 15. The methodaccording to claim 1, wherein the direct plasma is a noble gas plasma.16. The method according to claim 1, wherein the substrate is a 300 mmsilicon wafer, and wherein a plasma gas flow rate of at least 5.0 slm ismaintained during the micro pulsed plasma.
 17. The method according toclaim 1, wherein the method comprises curing the gap filling fluid, andwherein curing the gap filling fluid comprises subjecting the substrateto an indirect plasma after the gap has been filled with the gap fillingfluid.
 18. A system comprising: one or more reaction chambers; a gasinjection system fluidly coupled to at least one of the one or morereaction chambers; a first gas source for introducing a precursor andoptionally a carrier gas in the reactor chamber; a second gas source forintroducing a mixture of one or more further gasses into the reactorchamber; an exhaust; and a controller, wherein the controller isconfigured to control gas flow into the gas injection system to carryout a method according to claim 1.